Inventor
LAAKSONEN REIMA T
US7 patents
⚠️ This page may combine multiple inventors who share the name “LAAKSONEN REIMA T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
6 patentsUS6624068B2Sep 23, 2003
Polysilicon processing using an anti-reflective dual layer hardmask for 193 nm lithography
TEXAS INSTRUMENTS INC64 citations93
US6803661B2Oct 12, 2004
Polysilicon processing using an anti-reflective dual layer hardmask for 193 nm lithography
TEXAS INSTRUMENTS INC23 citations89
US6866974B2Mar 15, 2005
Semiconductor process using delay-compensated exposure
TEXAS INSTRUMENTS INC24 citations88
US7393787B2Jul 1, 2008
Formation of nitrogen containing dielectric layers having a uniform nitrogen distribution therein using a high temperature chemical treatment
TEXAS INSTRUMENTS INC9 citations83
US6087220AJul 11, 2000
Stack etch method for flash memory devices
TEXAS INSTRUMENTS INC12 citations71
US7435651B2Oct 14, 2008
Method to obtain uniform nitrogen profile in gate dielectrics
TEXAS INSTRUMENTS INC6 citations61