Inventor
RILEY TERRENCE J
US10 patents
⚠️ This page may combine multiple inventors who share the name “RILEY TERRENCE J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
8 patentsUS6725402B1Apr 20, 2004
Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework
ADVANCED MICRO DEVICES INC78 citations97
US6268270B1Jul 31, 2001
Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization
ADVANCED MICRO DEVICES INC57 citations93
US6629012B1Sep 30, 2003
Wafer-less qualification of a processing tool
ADVANCED MICRO DEVICES INC29 citations92
US6697691B1Feb 24, 2004
Method and apparatus for fault model analysis in manufacturing tools
ADVANCED MICRO DEVICES INC18 citations83
US6856849B2Feb 15, 2005
Method for adjusting rapid thermal processing (RTP) recipe setpoints based on wafer electrical test (WET) parameters
ADVANCED MICRO DEVICES INC6 citations73
US6819963B2Nov 16, 2004
Run-to-run control method for proportional-integral-derivative (PID) controller tuning for rapid thermal processing (RTP)
ADVANCED MICRO DEVICES INC11 citations73
US6324341B1Nov 27, 2001
Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization
ADVANCED MICRO DEVICES INC6 citations62
US6738731B1May 18, 2004
Method and apparatus for using tool state information to identify faulty wafers
ADVANCED MICRO DEVICES INC6 citations57