Inventor
KATAYAMA KATSUO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KATAYAMA KATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO METAL IND
6 patentsUS5911852AJun 15, 1999
Plasma processing apparatus
SUMITOMO METAL IND94 citations94
US5545258AAug 13, 1996
Microwave plasma processing system
SUMITOMO METAL IND49 citations91
US5529632AJun 25, 1996
Microwave plasma processing system
SUMITOMO METAL IND26 citations91
US6091045AJul 18, 2000
Plasma processing apparatus utilizing a microwave window having a thinner inner area
SUMITOMO METAL IND41 citations89
US5951887ASep 14, 1999
Plasma processing apparatus and plasma processing method
SUMITOMO METAL IND19 citations89
US5804923ASep 8, 1998
Plasma processing apparatus having a protected microwave transmission window
SUMITOMO METAL IND17 citations80