Inventor

MURATA KAZUTOSHI

JP7 patents

⚠️ This page may combine multiple inventors who share the name “MURATA KAZUTOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUI SHIPBUILDING ENG

2 patents

US7022545B2Apr 4, 2006

Production method of SiC monitor wafer

MITSUI SHIPBUILDING ENG11 citations81

US6995036B2Feb 7, 2006

Production method of α-SiC wafer

MITSUI SHIPBUILDING ENG7 citations66

TACHIBANA HIROYUKI

2 patents

US8202367B2Jun 19, 2012

Atomic layer growing apparatus

TACHIBANA HIROYUKI6 citations68

US9194043B2Nov 24, 2015

Atomic layer deposition apparatus

TACHIBANA HIROYUKI0 citations36

WASHIO KEISUKI

1 patent

US8440268B2May 14, 2013

Method and apparatus for growing plasma atomic layer

WASHIO KEISUKI5 citations62

MURATA KAZUTOSHI

1 patent

US9068261B2Jun 30, 2015

Atomic layer deposition apparatus and thin film forming method

MURATA KAZUTOSHI2 citations52

MITSUI ENGINEERING CO LTD

1 patent

US7544249B2Jun 9, 2009

Large-diameter SiC wafer and manufacturing method thereof

MITSUI ENGINEERING CO LTD0 citations42