Inventor
YAMAMOTO KAZUKI
JP27 patents
⚠️ This page may combine multiple inventors who share the name “YAMAMOTO KAZUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
7 patentsUS7746479B2Jun 29, 2010
Wavefront-aberration measuring device and exposure apparatus including the device
CANON KK3 citations62
US7623247B2Nov 24, 2009
Wavefront-aberration measuring device and exposure apparatus including the device
CANON KK3 citations62
US7609390B2Oct 27, 2009
Measurement method and apparatus, exposure apparatus
CANON KK3 citations62
US7403291B2Jul 22, 2008
Method of calculating two-dimensional wavefront aberration
CANON KK6 citations61
US7924437B2Apr 12, 2011
Measurement method and apparatus, exposure apparatus
CANON KK0 citations51
US9423299B2Aug 23, 2016
Exposure apparatus, exposure method, and device manufacturing method
CANON KK0 citations49
US8373866B2Feb 12, 2013
Wavefront aberration measuring apparatus, wavefront aberration measuring method, exposure apparatus, and device manufacturing method
CANON KK0 citations41
YAMAMOTO KAZUKI
4 patentsUS8905073B2Dec 9, 2014
Micro fluid device and trace liquid diluting method
YAMAMOTO KAZUKI2 citations58
US9222765B2Dec 29, 2015
Quantitative phase measurement apparatus
YAMAMOTO KAZUKI0 citations39
US8400612B2Mar 19, 2013
Wavefront aberration measurement apparatus, exposure apparatus, and method of manufacturing device
YAMAMOTO KAZUKI0 citations39
US8223314B2Jul 17, 2012
Method for measuring wavefront aberration
YAMAMOTO KAZUKI0 citations39