Inventor
ANDERL WILLI
DE12 patents
⚠️ This page may combine multiple inventors who share the name “ANDERL WILLI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
10 patentsUS10534269B2Jan 14, 2020
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element
ZEISS CARL SMT GMBH2 citations72
US9843153B2Dec 12, 2017
Beam reverser module and optical power amplifier having such a beam reverser module
ZEISS CARL SMT GMBH2 citations70
US11372334B2Jun 28, 2022
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element
ZEISS CARL SMT GMBH1 citations61
US7965456B2Jun 21, 2011
Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component
ZEISS CARL SMT GMBH4 citations60
US12547080B2Feb 10, 2026
Field facet system and lithography apparatus
ZEISS CARL SMT GMBH0 citations53
US12353137B2Jul 8, 2025
Field facet system and lithography apparatus
ZEISS CARL SMT GMBH0 citations53
US10969699B2Apr 6, 2021
Projection lighting system for semiconductor lithography with an improved heat transfer
ZEISS CARL SMT GMBH0 citations51
US10777958B2Sep 15, 2020
Beam reverser module and optical power amplifier having such a beam reverser module
ZEISS CARL SMT GMBH0 citations50
US11789367B2Oct 17, 2023
Facet mirror for an illumination optical unit of a projection exposure apparatus
ZEISS CARL SMT GMBH0 citations47
US10303067B2May 28, 2019
Cooler for use in a device in a vacuum
ZEISS CARL SMT GMBH0 citations43