Inventor

SHIBAYAMA TAKAAKI

JP3 patents

Patents

3 patents

US6770253B2Aug 3, 2004

Process for producing silicon tetrafluoride

CENTRAL GLASS CO LTD3 citations55

US7976817B2Jul 12, 2011

Method for production of iodine heptafluoride

CENTRAL GLASS CO LTD0 citations48

US9073953B2Jul 7, 2015

Method for refining trimethylsilane

CENTRAL GLASS CO LTD0 citations43