Inventor
KOEDA MASARU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “KOEDA MASARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIMADZU CORP
4 patentsUS5234537AAug 10, 1993
Dry etching method and its application
SHIMADZU CORP28 citations88
US7129028B2Oct 31, 2006
Method of forming holographic grating
SHIMADZU CORP15 citations79
US7455957B2Nov 25, 2008
Blazed holographic grating, method for producing the same and replica grating
SHIMADZU CORP5 citations60
US6942812B2Sep 13, 2005
Method of manufacturing etalon
SHIMADZU CORP2 citations57