Inventor
JIN MARC C
US11 patents
⚠️ This page may combine multiple inventors who share the name “JIN MARC C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEFEVRE PAUL
4 patentsUS8172648B2May 8, 2012
Chemical-mechanical planarization pad
LEFEVRE PAUL13 citations82
US8758659B2Jun 24, 2014
Method of grooving a chemical-mechanical planarization pad
LEFEVRE PAUL2 citations60
US8491360B2Jul 23, 2013
Three-dimensional network in CMP pad
LEFEVRE PAUL2 citations60
US8790165B2Jul 29, 2014
Multi-layered chemical-mechanical planarization pad
LEFEVRE PAUL0 citations49