Inventor

BURKART STEFAN

DE6 patents

⚠️ This page may combine multiple inventors who share the name “BURKART STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WEISER MARTIN

2 patents

US8466047B2Jun 18, 2013

Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements

WEISER MARTIN0 citations43

US8163632B2Apr 24, 2012

Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements

WEISER MARTIN0 citations43

GEN ELECTRIC

1 patent

US8358029B2Jan 22, 2013

Rotor-shaft integrated generator drive apparatus

GEN ELECTRIC19 citations80

ZEISS CARL SMT AG

1 patent

US7880969B2Feb 1, 2011

Optical integrator for an illumination system of a microlithographic projection exposure apparatus

ZEISS CARL SMT AG4 citations60

WOLF OLIVER

1 patent

US8520307B2Aug 27, 2013

Optical integrator for an illumination system of a microlithographic projection exposure apparatus

WOLF OLIVER4 citations54

BOSCH GMBH ROBERT

1 patent

US6739239B1May 25, 2004

Caston piston

BOSCH GMBH ROBERT1 citations46