Inventor
SUGAWARA MAI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “SUGAWARA MAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
9 patentsUS9796953B2Oct 24, 2017
Cleaning liquid for lithography and method for cleaning substrate
TOKYO OHKA KOGYO CO LTD2 citations70
US12428611B2Sep 30, 2025
Cleaning liquid used for cleaning metal resists, and cleaning method using cleaning liquid
TOKYO OHKA KOGYO CO LTD0 citations61
US12428737B2Sep 30, 2025
Cleaning liquid used for cleaning metal resists, and cleaning method using cleaning liquid
TOKYO OHKA KOGYO CO LTD0 citations61
US9405199B2Aug 2, 2016
Method for forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations61
US11120994B2Sep 14, 2021
Etching solution, and method of producing semiconductor element
TOKYO OHKA KOGYO CO LTD0 citations60
US9133352B2Sep 15, 2015
Surface treatment agent and surface treatment method
TOKYO OHKA KOGYO CO LTD3 citations59
US11965111B2Apr 23, 2024
Surface treatment agent and surface treatment method
TOKYO OHKA KOGYO CO LTD1 citations55
US9796879B2Oct 24, 2017
Film-forming material
TOKYO OHKA KOGYO CO LTD1 citations49
US8980534B2Mar 17, 2015
Method for forming fine pattern, and coating agent for pattern fining
TOKYO OHKA KOGYO CO LTD0 citations46