Inventor
KLOS LEO V
US10 patents
⚠️ This page may combine multiple inventors who share the name “KLOS LEO V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN ASSOCIATES
4 patentsUS5629528AMay 13, 1997
Charged particle beam system having beam-defining slit formed by rotating cyclinders
VARIAN ASSOCIATES25 citations90
US4744709AMay 17, 1988
Low deflection force sensitive pick
VARIAN ASSOCIATES20 citations81
US4931776AJun 5, 1990
Fluid flow sensor with flexible vane
VARIAN ASSOCIATES12 citations73
US4602713AJul 29, 1986
Multiple wafer holder for a wafer transfer system
VARIAN ASSOCIATES3 citations62
VARIAN SEMICONDUCTOR EQUIPMENT
4 patentsUS7491947B2Feb 17, 2009
Technique for improving performance and extending lifetime of indirectly heated cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT11 citations83
US7102139B2Sep 5, 2006
Source arc chamber for ion implanter having repeller electrode mounted to external insulator
VARIAN SEMICONDUCTOR EQUIPMENT14 citations83
US6448567B1Sep 10, 2002
Method and apparatus for shielding a valve gate and other valve parts
VARIAN SEMICONDUCTOR EQUIPMENT18 citations80
US8049192B2Nov 1, 2011
Apparatus and system for controlling ion ribbon beam uniformity in an ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT1 citations51