Inventor

KADAVANICH VIKORN MARTIN

DE3 patents

⚠️ This page may combine multiple inventors who share the name “KADAVANICH VIKORN MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US6270622B1Aug 7, 2001

Method and apparatus for improving accuracy of plasma etching process

LAM RES CORP23 citations86

US6136712AOct 24, 2000

Method and apparatus for improving accuracy of plasma etching process

LAM RES CORP28 citations86

PRELIC NENAD

1 patent

US8763533B2Jul 1, 2014

Active body

PRELIC NENAD6 citations65