Inventor
WOOD BINGXI SUN
US8 patents
Patents
8 patentsUS7604708B2Oct 20, 2009
Cleaning of native oxide with hydrogen-containing radicals
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US9673277B2Jun 6, 2017
Methods and apparatus for forming horizontal gate all around device structures
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US8652951B2Feb 18, 2014
Selective epitaxial germanium growth on silicon-trench fill and in situ doping
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US10777650B2Sep 15, 2020
Horizontal gate all around device nanowire air gap spacer formation
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US7892911B2Feb 22, 2011
Metal gate electrodes for replacement gate integration scheme
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US9960275B1May 1, 2018
Method of fabricating air-gap spacer for N7/N5 finFET and beyond
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US11848369B2Dec 19, 2023
Horizontal gate-all-around device nanowire air gap spacer formation
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US11282936B2Mar 22, 2022
Horizontal gate all around device nanowire air gap spacer formation
APPLIED MATERIALS INC0 citations61