Inventor
ZAAL KOEN JACOBUS JOHANNES MARIA
NL35 patents
⚠️ This page may combine multiple inventors who share the name “ZAAL KOEN JACOBUS JOHANNES MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
25 patentsUS7649611B2Jan 19, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV45 citations96
US7671963B2Mar 2, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV35 citations94
US7903866B2Mar 8, 2011
Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object
ASML NETHERLANDS BV16 citations92
US7486381B2Feb 3, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations92
US11669021B2Jun 6, 2023
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations84
US10761433B2Sep 1, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9851644B2Dec 26, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9436096B2Sep 6, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US11275316B2Mar 15, 2022
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US11150560B2Oct 19, 2021
Projection system and mirror and radiation source for a lithographic apparatus
ASML NETHERLANDS BV1 citations73
US10732511B2Aug 4, 2020
Projection system and mirror and radiation source for a lithographic apparatus
ASML NETHERLANDS BV1 citations73
US10222711B2Mar 5, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US10216093B2Feb 26, 2019
Projection system and minor and radiation source for a lithographic apparatus
ASML NETHERLANDS BV1 citations73
US9618859B2Apr 11, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US9581916B2Feb 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations63
US7746447B2Jun 29, 2010
Lithographic apparatus, device manufacturing method and method of calibrating a lithographic apparatus
ASML NETHERLANDS BV2 citations63
US7492440B2Feb 17, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7804582B2Sep 28, 2010
Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations60
US7426011B2Sep 16, 2008
Method of calibrating a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7423725B2Sep 9, 2008
Lithographic method
ASML NETHERLANDS BV5 citations60
US9470969B2Oct 18, 2016
Support, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US7528935B2May 5, 2009
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV0 citations51
US9494869B2Nov 15, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US9785060B2Oct 10, 2017
Stage system and lithographic apparatus comprising such stage system
ASML NETHERLANDS BV0 citations49
US9195150B2Nov 24, 2015
Lithographic apparatus comprising a support for holding an object, and a support for use therein
ASML NETHERLANDS BV0 citations41
ZAAL KOEN JACOBUS JOHANNES MARIA
3 patentsUS8743339B2Jun 3, 2014
Lithographic apparatus and device manufacturing method
ZAAL KOEN JACOBUS JOHANNES MARIA14 citations91
US8947631B2Feb 3, 2015
Lithographic apparatus and device manufacturing method
ZAAL KOEN JACOBUS JOHANNES MARIA3 citations72
US8941810B2Jan 27, 2015
Lithographic apparatus and device manufacturing method
ZAAL KOEN JACOBUS JOHANNES MARIA0 citations51