Inventor
BADIE RAMIN
NL11 patents
⚠️ This page may combine multiple inventors who share the name “BADIE RAMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS9823589B2Nov 21, 2017
Lithographic apparatus and method
ASML NETHERLANDS BV5 citations83
US9715174B2Jul 25, 2017
Droplet generator, EUV radiation source, lithographic apparatus, method for generating droplets and device manufacturing method
ASML NETHERLANDS BV2 citations71
US9442380B2Sep 13, 2016
Method and apparatus for generating radiation
ASML NETHERLANDS BV4 citations71
US9753383B2Sep 5, 2017
Radiation source and lithographic apparatus
ASML NETHERLANDS BV2 citations69
US10394141B2Aug 27, 2019
Radiation source and lithographic apparatus
ASML NETHERLANDS BV1 citations58
US10203611B2Feb 12, 2019
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations51
US9462667B2Oct 4, 2016
Radiation source and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10591828B2Mar 17, 2020
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations49
US9195150B2Nov 24, 2015
Lithographic apparatus comprising a support for holding an object, and a support for use therein
ASML NETHERLANDS BV0 citations41