Inventor
MORIYA ATSUSHI
JP35 patents
⚠️ This page may combine multiple inventors who share the name “MORIYA ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
18 patentsUS6503079B2Jan 7, 2003
Substrate processing apparatus and method for manufacturing semiconductor device
HITACHI INT ELECTRIC INC478 citations96
US9412587B2Aug 9, 2016
Method of manufacturing semiconductor device, substrate processing apparatus, gas supply system, and recording medium
HITACHI INT ELECTRIC INC4 citations83
US6872636B2Mar 29, 2005
Method for fabricating a semiconductor device
HITACHI INT ELECTRIC INC13 citations83
US9691609B2Jun 27, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC2 citations72
US10529560B2Jan 7, 2020
Method of manufacturing semiconductor device, substrate processing apparatus and recording medium
HITACHI INT ELECTRIC INC3 citations69
US6949474B2Sep 27, 2005
Method of manufacturing a semiconductor device and a semiconductor manufacture system
HITACHI INT ELECTRIC INC3 citations62
US9941119B2Apr 10, 2018
Method of forming silicon layer in manufacturing semiconductor device and recording medium
HITACHI INT ELECTRIC INC1 citations61
US10163910B2Dec 25, 2018
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations52
US8012885B2Sep 6, 2011
Manufacturing method of semiconductor device
HITACHI INT ELECTRIC INC1 citations52
US10262857B2Apr 16, 2019
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC0 citations51
US10090152B2Oct 2, 2018
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC1 citations51
US9997354B2Jun 12, 2018
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC1 citations51
US9540728B2Jan 10, 2017
Substrate processing apparatus, apparatus for manufacturing semiconductor device, and gas supply system
HITACHI INT ELECTRIC INC0 citations51
US7851379B2Dec 14, 2010
Substrate processing method and substrate processing apparatus
HITACHI INT ELECTRIC INC0 citations51
US8025739B2Sep 27, 2011
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC1 citations50
US10262872B2Apr 16, 2019
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC0 citations48
US10090322B2Oct 2, 2018
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations42
US10134584B2Nov 20, 2018
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC0 citations41
KOKUSAI ELECTRIC CORP
5 patentsUS11164744B2Nov 2, 2021
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations62
US12435439B2Oct 7, 2025
Substrate processing method, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations59
US12581902B2Mar 17, 2026
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations52
US11043392B2Jun 22, 2021
Method of manufacturing semiconductor device, substrate processing apparatus and recording medium
KOKUSAI ELECTRIC CORP0 citations51
US11581200B2Feb 14, 2023
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations48
NEC CORP
3 patentsUS11017218B2May 25, 2021
Suspicious person detection device, suspicious person detection method, and program
NEC CORP1 citations62
US10922571B2Feb 16, 2021
Information processing apparatus, information processing method, and program
NEC CORP0 citations52
US10114936B2Oct 30, 2018
Information processing device, authentication system, authentication method, and program
NEC CORP0 citations37