Inventor
FANG HAOQUAN
US12 patents
⚠️ This page may combine multiple inventors who share the name “FANG HAOQUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS11694911B2Jul 4, 2023
Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead
LAM RES CORP7 citations83
US9397011B1Jul 19, 2016
Systems and methods for reducing copper contamination due to substrate processing chambers with components made of alloys including copper
LAM RES CORP9 citations81
US12272570B2Apr 8, 2025
Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead
LAM RES CORP1 citations72
US12272571B2Apr 8, 2025
Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead
LAM RES CORP1 citations72
US12211709B2Jan 28, 2025
Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead
LAM RES CORP1 citations72
US10267728B2Apr 23, 2019
Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system
LAM RES CORP3 citations72
US12451332B2Oct 21, 2025
Atomic layer treatment process using metastable activated radical species
LAM RES CORP1 citations63