Inventor
SMITH NIGEL P
US16 patents
⚠️ This page may combine multiple inventors who share the name “SMITH NIGEL P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ONTO INNOVATION INC
5 patentsUS10935501B2Mar 2, 2021
Sub-resolution defect detection
ONTO INNOVATION INC4 citations72
US10830709B2Nov 10, 2020
Interferometer with pixelated phase shift mask
ONTO INNOVATION INC5 citations72
US12386271B2Aug 12, 2025
Multi-layer calibration for empirical overlay measurement
ONTO INNOVATION INC1 citations55
US11150195B2Oct 19, 2021
Sample surface polarization modification in interferometric defect inspection
ONTO INNOVATION INC0 citations51
US10937705B2Mar 2, 2021
Sample inspection using topography
ONTO INNOVATION INC0 citations38
NANOMETRICS INC
3 patentsUS7808643B2Oct 5, 2010
Determining overlay error using an in-chip overlay target
NANOMETRICS INC9 citations79
US10288408B2May 14, 2019
Scanning white-light interferometry system for characterization of patterned semiconductor features
NANOMETRICS INC5 citations72
US10107621B2Oct 23, 2018
Image based overlay measurement with finite gratings
NANOMETRICS INC2 citations72