Inventor
ANTONELLI GEORGE ANDREW
US37 patents
⚠️ This page may combine multiple inventors who share the name “ANTONELLI GEORGE ANDREW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS9778561B2Oct 3, 2017
Vacuum-integrated hardmask processes and apparatus
LAM RES CORP380 citations99
US10831096B2Nov 10, 2020
Vacuum-integrated hardmask processes and apparatus
LAM RES CORP34 citations98
US11209729B2Dec 28, 2021
Vacuum-integrated hardmask processes and apparatus
LAM RES CORP21 citations94
US10514598B2Dec 24, 2019
Vacuum-integrated hardmask processes and apparatus
LAM RES CORP33 citations94
US10049921B2Aug 14, 2018
Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor
LAM RES CORP15 citations82
US9337068B2May 10, 2016
Oxygen-containing ceramic hard masks and associated wet-cleans
LAM RES CORP13 citations82
US9245739B2Jan 26, 2016
Low-K oxide deposition by hydrolysis and condensation
LAM RES CORP14 citations81
US9502255B2Nov 22, 2016
Low-k damage repair and pore sealing agents with photosensitive end groups
LAM RES CORP4 citations72
US9865501B2Jan 9, 2018
Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layer
LAM RES CORP6 citations71
US10240236B2Mar 26, 2019
Clean resistant windows for ultraviolet thermal processing
LAM RES CORP0 citations40
NOVELLUS SYSTEMS INC
8 patentsUS7648899B1Jan 19, 2010
Interfacial layers for electromigration resistance improvement in damascene interconnects
NOVELLUS SYSTEMS INC78 citations97
US7858510B1Dec 28, 2010
Interfacial layers for electromigration resistance improvement in damascene interconnects
NOVELLUS SYSTEMS INC50 citations94
US8846525B2Sep 30, 2014
Hardmask materials
NOVELLUS SYSTEMS INC21 citations92
US9028924B2May 12, 2015
In-situ deposition of film stacks
NOVELLUS SYSTEMS INC7 citations82
US7799671B1Sep 21, 2010
Interfacial layers for electromigration resistance improvement in damascene interconnects
NOVELLUS SYSTEMS INC11 citations82
US10214816B2Feb 26, 2019
PECVD apparatus for in-situ deposition of film stacks
NOVELLUS SYSTEMS INC6 citations81
US9070750B2Jun 30, 2015
Methods for reducing metal oxide surfaces to modified metal surfaces using a gaseous reducing environment
NOVELLUS SYSTEMS INC7 citations76
US12385138B2Aug 12, 2025
Plasma-enhanced deposition of film stacks
NOVELLUS SYSTEMS INC0 citations60
ONTO INNOVATION INC
7 patentsUS11162897B2Nov 2, 2021
Optical metrology device using numerical aperture reduction
ONTO INNOVATION INC9 citations83
US10901241B1Jan 26, 2021
Optical metrology system using infrared wavelengths
ONTO INNOVATION INC10 citations83
US10775149B1Sep 15, 2020
Light source failure identification in an optical metrology device
ONTO INNOVATION INC7 citations81
US11808715B2Nov 7, 2023
Target for optical measurement of trenches
ONTO INNOVATION INC2 citations70
US12474643B2Nov 18, 2025
System and method for performing alignment and overlay measurement through an opaque layer
ONTO INNOVATION INC0 citations53
US11874229B2Jan 16, 2024
Apparatus and method for multiple source excitation Raman spectroscopy
ONTO INNOVATION INC0 citations52
US11668644B2Jun 6, 2023
Opto-acoustic measurement of a transparent film stack
ONTO INNOVATION INC0 citations45
ANTONELLI GEORGE ANDREW
5 patentsUS8557712B1Oct 15, 2013
PECVD flowable dielectric gap fill
ANTONELLI GEORGE ANDREW556 citations98
US8288292B2Oct 16, 2012
Depositing conformal boron nitride film by CVD without plasma
ANTONELLI GEORGE ANDREW16 citations92
US8217513B2Jul 10, 2012
Remote plasma processing of interface surfaces
ANTONELLI GEORGE ANDREW24 citations91
US8084339B2Dec 27, 2011
Remote plasma processing of interface surfaces
ANTONELLI GEORGE ANDREW29 citations91
US8479683B2Jul 9, 2013
Apparatus including a plasma chamber and controller including instructions for forming a boron nitride layer
ANTONELLI GEORGE ANDREW4 citations62