Inventor

SWEENEY JOSEPH D

US52 patents

⚠️ This page may combine multiple inventors who share the name “SWEENEY JOSEPH D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SWEENEY JOSEPH D

ENTEGRIS INC

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Anti-spike pressure management of pressure-regulated fluid storage and delivery vessels

Phosphorus or arsenic ion implantation utilizing enhanced source techniques

Ion implantation compositions, systems, and methods

Ion implantation system with mixture of arc chamber materials

Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system

Adsorbent-based, mechanically-regulated gas storage and delivery vessel

Carbon dopant gas and co-flow for implant beam and source life performance improvement

Enriched silicon precursor compositions and apparatus and processes for utilizing same

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Method and systems useful for producing aluminum ions

Germanium tetraflouride and hydrogen mixtures for an ion implantation system

Ion implantation system with mixture of arc chamber materials

Fluorine ion implantation system with non-tungsten materials and methods of using

Silicon implantation in substrates and provision of silicon precursor compositions therefor

Ion implantation processes and apparatus using gallium

Methods and assemblies using fluorine containing and inert gases for plasma flood gun operation

Isotopically-enriched boron-containing compounds, and methods of making and using same

Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system

Method and systems useful for producing aluminum ions

Carbon materials for carbon implantation

Ion implantation processes and apparatus

Isotopically-enriched boron-containing compounds, and methods of making and using same

Endpoint determination for capillary-assisted flow control

Component for solar adsorption refrigeration system and method of making such component

Carbon dopant gas and co-flow for implant beam and source life performance improvement

Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates

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ADVANCED TECH MATERIALS

Semiconductor manufacturing facility utilizing exhaust recirculation

Semiconductor manufacturing facility utilizing exhaust recirculation

Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream

Method for point-of-use treatment of effluent gas streams

Ion implantation system and method

Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system

Enriched silicon precursor compositions and apparatus and processes for utilizing same

Semiconductor manufacturing facility utilizing exhaust recirculation

Apparatus and process for integrated gas blending

KAIM ROBERT

Isotopically-enriched boron-containing compounds, and methods of making and using same

Isotopically-enriched boron-containing compounds, and methods of making and using same

Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system

Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system

Isotopically-enriched boron-containing compounds, and methods of making and using same

SWEENEY JOSEPH D

Ion source cleaning in semiconductor processing systems

Endpoint determination for capillary-assisted flow control

ATMI ECOSYS CORP

Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system

BYL OLEG

Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates

JONES EDWARD E

Ion implantation system and method

DIMEO FRANK

Cleaning of semiconductor processing systems

APPLIED MATERIALS INC

Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream

CARRUTHERS J DONALD

Component for solar adsorption refrigeration system and method of making such component