Inventor

BYL OLEG

US33 patents

⚠️ This page may combine multiple inventors who share the name “BYL OLEG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BYL OLEG

ENTEGRIS INC

Germanium tetraflouride and hydrogen mixtures for an ion implantation system

Phosphorus or arsenic ion implantation utilizing enhanced source techniques

Ion implantation compositions, systems, and methods

Ion implantation system with mixture of arc chamber materials

Carbon dopant gas and co-flow for implant beam and source life performance improvement

Method and systems useful for producing aluminum ions

Storage and delivery veseel for storing GeH4, using a zeolitic adsorbent

Germanium tetraflouride and hydrogen mixtures for an ion implantation system

Ion implantation system with mixture of arc chamber materials

Plasma immersion methods for ion implantation

Silicon implantation in substrates and provision of silicon precursor compositions therefor

Ion implantation processes and apparatus using gallium

Isotopically-enriched boron-containing compounds, and methods of making and using same

Method and systems useful for producing aluminum ions

Gas storage systems and method thereof

Systems and methods for storing molecular diborane

Carbon materials for carbon implantation

Ion implantation processes and apparatus

Isotopically-enriched boron-containing compounds, and methods of making and using same

Metal-organic-framework-containing bodies and related methods

Carbon dopant gas and co-flow for implant beam and source life performance improvement

Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates

Preparation of high pressure BF3/H2 mixtures

B2F4 manufacturing process

KAIM ROBERT

Isotopically-enriched boron-containing compounds, and methods of making and using same

Isotopically-enriched boron-containing compounds, and methods of making and using same

Isotopically-enriched boron-containing compounds, and methods of making and using same

BYL OLEG

Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates

Cluster ion implantation of arsenic and phosphorus

JONES EDWARD E

Ion implantation system and method

DIMEO FRANK

Cleaning of semiconductor processing systems

ADVANCED TECH MATERIALS

Ion implantation system and method

SWEENEY JOSEPH D

Ion source cleaning in semiconductor processing systems