Inventor
KAIM ROBERT
US28 patents
⚠️ This page may combine multiple inventors who share the name “KAIM ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
9 patentsUS9170246B2Oct 27, 2015
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
ENTEGRIS INC4 citations83
US9754786B2Sep 5, 2017
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
ENTEGRIS INC2 citations72
US9171725B2Oct 27, 2015
Enriched silicon precursor compositions and apparatus and processes for utilizing same
ENTEGRIS INC4 citations71
US11062906B2Jul 13, 2021
Silicon implantation in substrates and provision of silicon precursor compositions therefor
ENTEGRIS INC0 citations62
US9142387B2Sep 22, 2015
Isotopically-enriched boron-containing compounds, and methods of making and using same
ENTEGRIS INC3 citations62
US9012874B2Apr 21, 2015
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
ENTEGRIS INC3 citations62
US10497569B2Dec 3, 2019
Carbon materials for carbon implantation
ENTEGRIS INC0 citations52
US9685304B2Jun 20, 2017
Isotopically-enriched boron-containing compounds, and methods of making and using same
ENTEGRIS INC0 citations52
US9455147B2Sep 27, 2016
Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation
ENTEGRIS INC0 citations52
ADVANCED TECH MATERIALS
6 patentsUS7966879B2Jun 28, 2011
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
ADVANCED TECH MATERIALS25 citations92
US7943204B2May 17, 2011
Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation
ADVANCED TECH MATERIALS20 citations92
US9111860B2Aug 18, 2015
Ion implantation system and method
ADVANCED TECH MATERIALS6 citations84
US8785889B2Jul 22, 2014
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
ADVANCED TECH MATERIALS5 citations83
US7819981B2Oct 26, 2010
Methods for cleaning ion implanter components
ADVANCED TECH MATERIALS16 citations83
US8779383B2Jul 15, 2014
Enriched silicon precursor compositions and apparatus and processes for utilizing same
ADVANCED TECH MATERIALS13 citations82
KAIM ROBERT
5 patentsUS8598022B2Dec 3, 2013
Isotopically-enriched boron-containing compounds, and methods of making and using same
KAIM ROBERT12 citations92
US8062965B2Nov 22, 2011
Isotopically-enriched boron-containing compounds, and methods of making and using same
KAIM ROBERT21 citations92
US8399865B2Mar 19, 2013
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
KAIM ROBERT11 citations91
US8237134B2Aug 7, 2012
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
KAIM ROBERT23 citations91
US8138071B2Mar 20, 2012
Isotopically-enriched boron-containing compounds, and methods of making and using same
KAIM ROBERT3 citations62