Inventor
LEE MING-TAN
TW25 patents
Patents
25 patentsUS11587818B2Feb 21, 2023
Chuck design and method for wafer
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10859922B1Dec 8, 2020
Lithography system and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11841618B2Dec 12, 2023
Photoresist system and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11215929B2Jan 4, 2022
Photoresist system and method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10861710B2Dec 8, 2020
Methods of manufacturing semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations72
US12431400B2Sep 30, 2025
Packages with enlarged through-vias in encapsulant
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12353134B2Jul 8, 2025
Photoresist system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12148651B2Nov 19, 2024
Chuck design and method for wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11823969B2Nov 21, 2023
Packages with enlarged through-vias in encapsulant
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11670541B2Jun 6, 2023
Methods of manufacturing semiconductor device using phase shift mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11515224B2Nov 29, 2022
Packages with enlarged through-vias in encapsulant
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11189521B2Nov 30, 2021
Methods of manufacturing redistribution circuit structures using phase shift mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11037877B2Jun 15, 2021
Package structure and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10867793B2Dec 15, 2020
Semiconductor package and method of fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12032295B2Jul 9, 2024
Optical lithography system and method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11960211B2Apr 16, 2024
Optical lithography system and method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11977333B2May 7, 2024
Semiconductor devices and methods of manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11842896B2Dec 12, 2023
Semiconductor devices and methods of manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11145560B2Oct 12, 2021
Semiconductor device and methods of manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11127688B2Sep 21, 2021
Semiconductor package and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12197138B2Jan 14, 2025
Machine learning on overlay management
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US11158600B2Oct 26, 2021
Lithography process for semiconductor packaging and structures resulting therefrom
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US11143965B2Oct 12, 2021
Optical lithography system for patterning semiconductor devices and method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10879166B2Dec 29, 2020
Package structure having redistribution structure with photosensitive and non-photosensitive dielectric materials and fabricating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
US10312118B2Jun 4, 2019
Bonding apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations36