Inventor
MYOUNG NOH HOON
KR3 patents
Patents
3 patentsUS11152240B2Oct 19, 2021
Apparatus for conveying carrier and system for controlling carrier having the same
SEMES CO LTD1 citations55
US11938493B2Mar 26, 2024
Apparatus for processing substrate and operating method thereof
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US12227373B2Feb 18, 2025
Article transport vehicle, rail assembly, and article transport system including the same
SEMES CO LTD0 citations45