Inventor

KANG HAN SEON

KR2 patents

Patents

2 patents

US11152240B2Oct 19, 2021

Apparatus for conveying carrier and system for controlling carrier having the same

SEMES CO LTD1 citations55

US11938493B2Mar 26, 2024

Apparatus for processing substrate and operating method thereof

SEMES CO LTD1 citations54