Inventor
SHEN CHIEH-YI
TW6 patents
Patents
6 patentsUS11398406B2Jul 26, 2022
Selective deposition of metal barrier in damascene processes
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12046476B2Jul 23, 2024
Wet etching chemistry and method of forming semiconductor device using the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US12408347B2Sep 2, 2025
Method for forming a 3-D semiconductor memory structure comprising horizontal and vertical conductive lines
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12068194B2Aug 20, 2024
Selective deposition of metal barrier in damascene processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11837500B2Dec 5, 2023
Selective deposition of metal barrier in damascene processes and the structures formed thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12557577B2Feb 17, 2026
Method of forming semiconductor device using wet etching chemistry
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58