Inventor
Huang shang-yun
TW4 patents
Patents
4 patentsUS12053745B2Aug 6, 2024
System for storing chemical liquid and method for adjusting gas concentration in chemical liquid
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12142666B2Nov 12, 2024
Semiconductor device having a gate structure with different lengths between laterally etched spacers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations53
US11705502B2Jul 18, 2023
Method for laterally etching gate spacers
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations53
US9908201B2Mar 6, 2018
Systems and methods for edge bead removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49