Inventor
HUYNH CUC K
US17 patents
⚠️ This page may combine multiple inventors who share the name “HUYNH CUC K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
16 patentsUS5981148ANov 9, 1999
Method for forming sidewall spacers using frequency doubling hybrid resist and device formed thereby
IBM49 citations96
US5896870AApr 27, 1999
Method of removing slurry particles
IBM55 citations95
US6432823B1Aug 13, 2002
Off-concentric polishing system design
IBM42 citations92
US5976768ANov 2, 1999
Method for forming sidewall spacers using frequency doubling hybrid resist and device formed thereby
IBM31 citations92
US6468135B1Oct 22, 2002
Method and apparatus for multiphase chemical mechanical polishing
IBM23 citations91
US6171436B1Jan 9, 2001
Apparatus for removing slurry particles
IBM16 citations91
US5834642ANov 10, 1998
Downstream monitor for CMP brush cleaners
IBM17 citations91
US6300246B1Oct 9, 2001
Method for chemical mechanical polishing of semiconductor wafer
IBM18 citations83
US6599173B1Jul 29, 2003
Method to prevent leaving residual metal in CMP process of metal interconnect
IBM14 citations81
US5974868ANov 2, 1999
Downstream monitor for CMP brush cleaners
IBM13 citations72
US7014959B2Mar 21, 2006
CD uniformity of chrome etch to photomask process
IBM8 citations71
US7304000B2Dec 4, 2007
Photoresist trimming process
IBM5 citations69
US6387810B2May 14, 2002
Method for homogenizing device parameters through photoresist planarization
IBM11 citations68
US7754394B2Jul 13, 2010
Method to etch chrome for photomask fabrication
IBM2 citations59
US7960288B2Jun 14, 2011
Photoresist trimming process
IBM0 citations48
US7955988B2Jun 7, 2011
Photoresist trimming process
IBM0 citations48