Inventor
LEVIN JAMES P
US10 patents
Patents
10 patentsUS5149974ASep 22, 1992
Gas delivery for ion beam deposition and etching
IBM56 citations95
US4388386AJun 14, 1983
Mask set mismatch
IBM31 citations90
US5159170AOct 27, 1992
Grid structure for reducing current density in focussed ion beam
IBM7 citations73
US6777137B2Aug 17, 2004
EUVL mask structure and method of formation
IBM7 citations69
US7754394B2Jul 13, 2010
Method to etch chrome for photomask fabrication
IBM2 citations59
US6270949B1Aug 7, 2001
Single component developer for copolymer resists
IBM4 citations59
US9996000B2Jun 12, 2018
Test pattern layout for test photomask and method for evaluating critical dimension changes
IBM0 citations47
US9989843B2Jun 5, 2018
Test pattern layout for test photomask and method for evaluating critical dimension changes
IBM0 citations47
US9372394B2Jun 21, 2016
Test pattern layout for test photomask and method for evaluating critical dimension changes
IBM0 citations47
US6426177B2Jul 30, 2002
Single component developer for use with ghost exposure
IBM0 citations45