Inventor

HIDA TSUYOSHI

JP7 patents

⚠️ This page may combine multiple inventors who share the name “HIDA TSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents

US11942357B2Mar 26, 2024

Workpiece placement apparatus and processing apparatus

TOKYO ELECTRON LTD0 citations60

US11410871B2Aug 9, 2022

Workpiece placement apparatus and processing apparatus

TOKYO ELECTRON LTD0 citations60

US10020172B2Jul 10, 2018

Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method

TOKYO ELECTRON LTD1 citations51

US8776356B2Jul 15, 2014

Electrostatic chuck and manufacturing method thereof

TOKYO ELECTRON LTD0 citations51

OHATA MITSUNORI

1 patent

US9076636B2Jul 7, 2015

Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method

OHATA MITSUNORI29 citations91

ADVANCE DENKI KOGYO KK

1 patent

US6199582B1Mar 13, 2001

Flow control valve

ADVANCE DENKI KOGYO KK36 citations89

HIDA TSUYOSHI

1 patent

US8517392B2Aug 27, 2013

Electrostatic chuck and manufacturing method thereof

HIDA TSUYOSHI1 citations44