Inventor

GENG YUJIE

CN4 patents

⚠️ This page may combine multiple inventors who share the name “GENG YUJIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD

3 patents

US10643843B2May 5, 2020

Film forming method and aluminum nitride film forming method for semiconductor apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD2 citations68

US10640862B2May 5, 2020

Method for forming film and method for forming aluminum nitride film

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD2 citations68

US11315768B2Apr 26, 2022

Loading apparatus and physical vapor deposition apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations55

STATE GRID SHANDONG ELECTRIC POWER RES INSTITUTE

1 patent

US11954210B2Apr 9, 2024

Hierarchical health index evaluation method and apparatus for intelligent substation

STATE GRID SHANDONG ELECTRIC POWER RES INSTITUTE0 citations42