Inventor
ODANAKA KENTARO
JP25 patents
Patents
25 patentsUS6939785B2Sep 6, 2005
Process for manufacturing a semiconductor chip
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US7326878B2Feb 5, 2008
Laser beam processing machine
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US9724783B2Aug 8, 2017
Laser processing apparatus
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US11393709B2Jul 19, 2022
Processing apparatus and workpiece processing method
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US9870961B2Jan 16, 2018
Wafer processing method
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US10784166B2Sep 22, 2020
Wafer processing method
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US10807198B2Oct 20, 2020
Laser processing apparatus
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US12183635B2Dec 31, 2024
Wafer processing method and wafer processing apparatus
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US12148649B2Nov 19, 2024
Processing apparatus and workpiece processing method
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US11515210B2Nov 29, 2022
Wafer processing method and wafer processing apparatus
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US10668569B2Jun 2, 2020
Laser processing apparatus
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US12532685B2Jan 20, 2026
Method of processing wafer and laser applying apparatus
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US12533751B2Jan 27, 2026
Laser processing apparatus and laser processing method
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US12489019B2Dec 2, 2025
Method of processing wafer and laser applying apparatus
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US12343812B2Jul 1, 2025
Laser processing apparatus
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US12337412B2Jun 24, 2025
Laser processing apparatus and laser processing method
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US12191216B2Jan 7, 2025
Laser processing apparatus and method of correcting converged spot position
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US10955290B2Mar 23, 2021
Laser processing apparatus and output power checking method
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US9421643B2Aug 23, 2016
Laser processing apparatus
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US10991622B2Apr 27, 2021
Wafer processing method
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US10991623B2Apr 27, 2021
Wafer processing method
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US9976951B2May 22, 2018
Protective film detecting method
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US10354919B2Jul 16, 2019
Wafer dividing method
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US9613415B2Apr 4, 2017
Protective film detecting apparatus and protective film detecting method
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US10207362B2Feb 19, 2019
Laser processing apparatus
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