Inventor
UEDA AKITSUGU
JP10 patents
Patents
10 patentsUS11798823B2Oct 24, 2023
Light irradiation type thermal process apparatus using a gas ring
SCREEN HOLDINGS CO LTD3 citations72
US11322375B2May 3, 2022
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD2 citations71
US10319616B2Jun 11, 2019
Heat treatment method and heat treatment apparatus of light irradiation type
SCREEN HOLDINGS CO LTD2 citations69
US11574824B2Feb 7, 2023
Heat treatment method including low temperature degassing before flash lamp anneal and heat treatment apparatus thereof
SCREEN HOLDINGS CO LTD0 citations62
US12341031B2Jun 24, 2025
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations61
US11901200B2Feb 13, 2024
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations61
US11282708B2Mar 22, 2022
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations61
US10580667B2Mar 3, 2020
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations61
US12283498B2Apr 22, 2025
Light irradiation type heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations51
US11621178B2Apr 4, 2023
Light irradiation type heat treatment apparatus including oxygen analyzer and heat treatment method thereof
SCREEN HOLDINGS CO LTD0 citations45