Inventor
HUOTARI HANNU
FI44 patents
⚠️ This page may combine multiple inventors who share the name “HUOTARI HANNU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
32 patentsUS10600637B2Mar 24, 2020
Formation of SiOC thin films
ASM IP HOLDING BV353 citations99
US10428419B2Oct 1, 2019
Combination CVD/ALD method, source and pulse profile modification
ASM IP HOLDING BV391 citations99
US10047435B2Aug 14, 2018
Dual selective deposition
ASM IP HOLDING BV463 citations99
US9895715B2Feb 20, 2018
Selective deposition of metals, metal oxides, and dielectrics
ASM IP HOLDING BV525 citations99
US10695794B2Jun 30, 2020
Vapor phase deposition of organic films
ASM IP HOLDING BV53 citations98
US10443123B2Oct 15, 2019
Dual selective deposition
ASM IP HOLDING BV46 citations98
US10343186B2Jul 9, 2019
Vapor phase deposition of organic films
ASM IP HOLDING BV53 citations98
US10814349B2Oct 27, 2020
Vapor phase deposition of organic films
ASM IP HOLDING BV19 citations94
US10456808B2Oct 29, 2019
Selective deposition of metals, metal oxides, and dielectrics
ASM IP HOLDING BV12 citations93
US11389824B2Jul 19, 2022
Vapor phase deposition of organic films
ASM IP HOLDING BV11 citations86
US11213853B2Jan 4, 2022
Selective deposition of metals, metal oxides, and dielectrics
ASM IP HOLDING BV9 citations86
US11654454B2May 23, 2023
Vapor phase deposition of organic films
ASM IP HOLDING BV1 citations73
US11562900B2Jan 24, 2023
Formation of SiOC thin films
ASM IP HOLDING BV1 citations73
US11525184B2Dec 13, 2022
Dual selective deposition
ASM IP HOLDING BV1 citations73
US11446699B2Sep 20, 2022
Vapor phase deposition of organic films
ASM IP HOLDING BV1 citations73
US11217444B2Jan 4, 2022
Method for forming an ultraviolet radiation responsive metal oxide-containing film
ASM IP HOLDING BV2 citations73
US11047040B2Jun 29, 2021
Dual selective deposition
ASM IP HOLDING BV3 citations73
US9941425B2Apr 10, 2018
Photoactive devices and materials
ASM IP HOLDING BV2 citations73
US9790594B2Oct 17, 2017
Combination CVD/ALD method, source and pulse profile modification
ASM IP HOLDING BV3 citations73
US12444599B2Oct 14, 2025
Method for forming an ultraviolet radiation responsive metal oxide-containing film
ASM IP HOLDING BV0 citations63
US12272546B2Apr 8, 2025
Formation of SiOC thin films
ASM IP HOLDING BV0 citations63
US12138654B2Nov 12, 2024
Vapor phase deposition of organic films
ASM IP HOLDING BV0 citations63
US12134108B2Nov 5, 2024
Vapor phase deposition of organic films
ASM IP HOLDING BV0 citations63
US11975357B2May 7, 2024
Selective deposition of metals, metal oxides, and dielectrics
ASM IP HOLDING BV0 citations63
US12463094B2Nov 4, 2025
Multiple-layer method and system for forming material within a gap
ASM IP HOLDING BV0 citations62
US12241156B2Mar 4, 2025
Combination CVD/ALD method, source and pulse profile modification
ASM IP HOLDING BV0 citations62
US11365478B2Jun 21, 2022
Combination CVD/ALD method, source and pulse profile modification
ASM IP HOLDING BV0 citations62
US11362222B2Jun 14, 2022
Photoactive devices and materials
ASM IP HOLDING BV0 citations62
US11823976B2Nov 21, 2023
Fluorine-containing conductive films
ASM IP HOLDING BV0 citations61
US11450591B2Sep 20, 2022
Fluorine-containing conductive films
ASM IP HOLDING BV0 citations61
US10861986B2Dec 8, 2020
Photoactive devices and materials
ASM IP HOLDING BV0 citations52
US10643925B2May 5, 2020
Fluorine-containing conductive films
ASM IP HOLDING BV0 citations51
ASM INT
6 patentsUS7923382B2Apr 12, 2011
Method for forming roughened surface
ASM INT347 citations99
US7563715B2Jul 21, 2009
Method of producing thin films
ASM INT513 citations99
US7045406B2May 16, 2006
Method of forming an electrode with adjusted work function
ASM INT155 citations99
US7666773B2Feb 23, 2010
Selective deposition of noble metal thin films
ASM INT48 citations97
US7491634B2Feb 17, 2009
Methods for forming roughened surfaces and applications thereof
ASM INT17 citations93
US7985669B2Jul 26, 2011
Selective deposition of noble metal thin films
ASM INT10 citations83