Inventor

Takematsu Yusuke

JP2 patents

Patents

2 patents

US12532690B2Jan 20, 2026

Substrate processing apparatus and substrate processing method

SCREEN HOLDINGS CO LTD0 citations44

US11094564B2Aug 17, 2021

Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method

SCREEN HOLDINGS CO LTD0 citations41