Inventor
GUENTHER ROLF
DE17 patents
⚠️ This page may combine multiple inventors who share the name “GUENTHER ROLF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6367410B1Apr 9, 2002
Closed-loop dome thermal control apparatus for a semiconductor wafer processing system
APPLIED MATERIALS INC620 citations96
US7354501B2Apr 8, 2008
Upper chamber for high density plasma CVD
APPLIED MATERIALS INC39 citations89
US7074298B2Jul 11, 2006
High density plasma CVD chamber
APPLIED MATERIALS INC23 citations89
US5893643AApr 13, 1999
Apparatus for measuring pedestal temperature in a semiconductor wafer processing system
APPLIED MATERIALS INC37 citations89
US6822185B2Nov 23, 2004
Temperature controlled dome-coil system for high power inductively coupled plasma systems
APPLIED MATERIALS INC7 citations73
EVOTEC BIOSYSTEMS AG
2 patentsUS6208815B1Mar 27, 2001
Method for differentiating or detecting particles in a sample by identifying signal segments of time-resolved, optical raw signals from the sample on the basis of single photon detection
EVOTEC BIOSYSTEMS AG76 citations91
US7202953B1Apr 10, 2007
Scanning microscopic method having high axial resolution
EVOTEC BIOSYSTEMS AG35 citations86