Inventor
PASQUALE FRANK LOREN
US10 patents
⚠️ This page may combine multiple inventors who share the name “PASQUALE FRANK LOREN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS11661654B2May 30, 2023
Substrate processing systems including gas delivery system with reduced dead legs
LAM RES CORP2 citations68
US11959175B2Apr 16, 2024
Fill on demand ampoule refill
LAM RES CORP1 citations60
US11959172B2Apr 16, 2024
Substrate processing systems including gas delivery system with reduced dead legs
LAM RES CORP0 citations57
US12291777B2May 6, 2025
Throughput improvement with interval conditioning purging
LAM RES CORP0 citations56
US12252782B2Mar 18, 2025
In-situ PECVD cap layer
LAM RES CORP0 citations56
US12057300B2Aug 6, 2024
Apparatus for cleaning plasma chambers
LAM RES CORP0 citations51
US11078570B2Aug 3, 2021
Azimuthal critical dimension non-uniformity for double patterning process
LAM RES CORP0 citations51
US12421602B2Sep 23, 2025
Multi-station semiconductor processing with independently adjustable pedestals
LAM RES CORP0 citations49
US12270103B2Apr 8, 2025
Plasma-enhanced atomic layer deposition with radio-frequency power ramping
LAM RES CORP0 citations43