Inventor
SUN MEI H
US28 patents
⚠️ This page may combine multiple inventors who share the name “SUN MEI H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUXTRON CORP
15 patentsUS4986671AJan 22, 1991
Three-parameter optical fiber sensor and system
LUXTRON CORP722 citations99
US4752141AJun 21, 1988
Fiberoptic sensing of temperature and/or other physical parameters
LUXTRON CORP154 citations97
US4988212AJan 29, 1991
Fiberoptic sensing of temperature and/or other physical parameters
LUXTRON CORP74 citations96
US4859079AAug 22, 1989
Optical system using a luminescent material sensor for measuring very high temperatures
LUXTRON CORP57 citations96
US4652143AMar 24, 1987
Optical temperature measurement techniques
LUXTRON CORP118 citations96
US6010538AJan 4, 2000
In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link
LUXTRON CORP216 citations95
US5351268ASep 27, 1994
Modular luminescence-based measuring system using fast digital signal processing
LUXTRON CORP51 citations95
US5107445AApr 21, 1992
Modular luminescence-based measuring system using fast digital signal processing
LUXTRON CORP89 citations95
US4789992ADec 6, 1988
Optical temperature measurement techniques
LUXTRON CORP84 citations93
US5414266AMay 9, 1995
Measuring system employing a luminescent sensor and methods of designing the system
LUXTRON CORP29 citations92
US4883354ANov 28, 1989
Fiberoptic sensing of temperature and/or other physical parameters
LUXTRON CORP53 citations92
US4785824ANov 22, 1988
Optical fiber probe for measuring the temperature of an ultrasonically heated object
LUXTRON CORP31 citations92
US4626110ADec 2, 1986
Technique for optically measuring the temperature of an ultrasonically heated object
LUXTRON CORP44 citations92
US5110216AMay 5, 1992
Fiberoptic techniques for measuring the magnitude of local microwave fields and power
LUXTRON CORP40 citations91
US5109595AMay 5, 1992
Method of making a fiberoptic sensor of a microwave field
LUXTRON CORP10 citations72
SENSARRAY CORP
5 patentsUS6190040B1Feb 20, 2001
Apparatus for sensing temperature on a substrate in an integrated circuit fabrication tool
SENSARRAY CORP132 citations97
US7135852B2Nov 14, 2006
Integrated process condition sensing wafer and data analysis system
SENSARRAY CORP79 citations95
US6325536B1Dec 4, 2001
Integrated wafer temperature sensors
SENSARRAY CORP108 citations95
US6616332B1Sep 9, 2003
Optical techniques for measuring parameters such as temperature across a surface
SENSARRAY CORP106 citations92
US6915589B2Jul 12, 2005
Sensor positioning systems and methods
SENSARRAY CORP16 citations79
KLA TENCOR CORP
5 patentsUS7855549B2Dec 21, 2010
Integrated process condition sensing wafer and data analysis system
KLA TENCOR CORP23 citations91
US7757574B2Jul 20, 2010
Process condition sensing wafer and data analysis system
KLA TENCOR CORP13 citations84
US7698952B2Apr 20, 2010
Pressure sensing device
KLA TENCOR CORP13 citations81
US7497134B2Mar 3, 2009
Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization process
KLA TENCOR CORP10 citations81
US9964440B2May 8, 2018
Wafer level spectrometer
KLA TENCOR CORP2 citations73