Inventor
KUMAGAI TAKESHI
JP32 patents
⚠️ This page may combine multiple inventors who share the name “KUMAGAI TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
15 patentsUS9023738B2May 5, 2015
Film deposition method
TOKYO ELECTRON LTD489 citations99
US8835332B2Sep 16, 2014
Film deposition method
TOKYO ELECTRON LTD19 citations92
US7156923B2Jan 2, 2007
Silicon nitride film forming method, silicon nitride film forming system and silicon nitride film forming system precleaning method
TOKYO ELECTRON LTD19 citations92
US6844273B2Jan 18, 2005
Precleaning method of precleaning a silicon nitride film forming system
TOKYO ELECTRON LTD20 citations92
US9551068B2Jan 24, 2017
Film forming method and film forming apparatus
TOKYO ELECTRON LTD12 citations82
US9677174B2Jun 13, 2017
Film deposition method for producing a reaction product on a substrate
TOKYO ELECTRON LTD2 citations73
US9293321B2Mar 22, 2016
Method of manufacturing a silicon oxide film
TOKYO ELECTRON LTD4 citations73
US8853097B2Oct 7, 2014
Particle reducing method
TOKYO ELECTRON LTD4 citations73
US7125812B2Oct 24, 2006
CVD method and device for forming silicon-containing insulation film
TOKYO ELECTRON LTD8 citations71
US9368341B2Jun 14, 2016
Method of manufacturing a silicon oxide film
TOKYO ELECTRON LTD2 citations63
US8932963B2Jan 13, 2015
Film deposition method
TOKYO ELECTRON LTD2 citations63
US9441291B2Sep 13, 2016
Method of depositing a film
TOKYO ELECTRON LTD2 citations59
US11118265B2Sep 14, 2021
Film deposition method and computer program storage medium
TOKYO ELECTRON LTD0 citations52
US10458016B2Oct 29, 2019
Method for forming a protective film
TOKYO ELECTRON LTD0 citations49
US10590534B2Mar 17, 2020
Film deposition method and film deposition apparatus
TOKYO ELECTRON LTD0 citations42
ALAXALA NETWORKS CORP
4 patentsUS7855960B2Dec 21, 2010
Traffic shaping method and device
ALAXALA NETWORKS CORP7 citations71
US9667548B2May 30, 2017
Relay apparatus and relay method
ALAXALA NETWORKS CORP2 citations67
US10389626B2Aug 20, 2019
Transfer device
ALAXALA NETWORKS CORP0 citations41
US10326705B2Jun 18, 2019
Communication device and communication method
ALAXALA NETWORKS CORP0 citations40