P

Inventor

KUMAGAI TAKESHI

JP32 patents
⚠️ This page may combine multiple inventors who share the name “KUMAGAI TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

15 patents
US9023738B2May 5, 2015

Film deposition method

TOKYO ELECTRON LTD489 citations99
US8835332B2Sep 16, 2014

Film deposition method

TOKYO ELECTRON LTD19 citations92
US7156923B2Jan 2, 2007

Silicon nitride film forming method, silicon nitride film forming system and silicon nitride film forming system precleaning method

TOKYO ELECTRON LTD19 citations92
US6844273B2Jan 18, 2005

Precleaning method of precleaning a silicon nitride film forming system

TOKYO ELECTRON LTD20 citations92
US9551068B2Jan 24, 2017

Film forming method and film forming apparatus

TOKYO ELECTRON LTD12 citations82
US9677174B2Jun 13, 2017

Film deposition method for producing a reaction product on a substrate

TOKYO ELECTRON LTD2 citations73
US9293321B2Mar 22, 2016

Method of manufacturing a silicon oxide film

TOKYO ELECTRON LTD4 citations73
US8853097B2Oct 7, 2014

Particle reducing method

TOKYO ELECTRON LTD4 citations73
US7125812B2Oct 24, 2006

CVD method and device for forming silicon-containing insulation film

TOKYO ELECTRON LTD8 citations71
US9368341B2Jun 14, 2016

Method of manufacturing a silicon oxide film

TOKYO ELECTRON LTD2 citations63
US8932963B2Jan 13, 2015

Film deposition method

TOKYO ELECTRON LTD2 citations63
US9441291B2Sep 13, 2016

Method of depositing a film

TOKYO ELECTRON LTD2 citations59
US11118265B2Sep 14, 2021

Film deposition method and computer program storage medium

TOKYO ELECTRON LTD0 citations52
US10458016B2Oct 29, 2019

Method for forming a protective film

TOKYO ELECTRON LTD0 citations49
US10590534B2Mar 17, 2020

Film deposition method and film deposition apparatus

TOKYO ELECTRON LTD0 citations42

ALAXALA NETWORKS CORP

4 patents

ALPS ELECTRIC CO LTD

3 patents

SEIKO EPSON CORP

2 patents

KATO HITOSHI

2 patents

KUMAGAI TAKESHI

2 patents

HINOSUGI HIDEKI

2 patents

MITSUBISHI ELECTRIC CORP

1 patent

SUNTORY HOLDINGS LTD

1 patent