Inventor

FRUTIGER WILLIAM A

US6 patents

⚠️ This page may combine multiple inventors who share the name “FRUTIGER WILLIAM A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ENERGY SCIENCES INC

2 patents

US4382186AMay 3, 1983

Process and apparatus for converged fine line electron beam treatment of objects

ENERGY SCIENCES INC89 citations95

US4100450AJul 11, 1978

Method of and apparatus for generating longitudinal strips of energetic electron beams

ENERGY SCIENCES INC12 citations65

SONY CORP

2 patents

US4446373AMay 1, 1984

Process and apparatus for converged fine line electron beam treatment objects

SONY CORP16 citations72

US4634921AJan 6, 1987

Thermionic cathode heater

SONY CORP6 citations60

VARIAN ASSOCIATES

1 patent

US5452177ASep 19, 1995

Electrostatic wafer clamp

VARIAN ASSOCIATES116 citations95

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US6388861B1May 14, 2002

Electrostatic wafer clamp

VARIAN SEMICONDUCTOR EQUIPMENT51 citations94