Inventor
LI YAO-EN
US20 patents
⚠️ This page may combine multiple inventors who share the name “LI YAO-EN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR LIQUIDE AMERICAN
12 patentsUS5858065AJan 12, 1999
Process and system for separation and recovery of perfluorocompound gases
AIR LIQUIDE AMERICAN122 citations97
US5814127ASep 29, 1998
Process for recovering CF4 and C2 F6 from a gas
AIR LIQUIDE AMERICAN42 citations96
US5919285AJul 6, 1999
Process and system for separation and recovery of perfluorocompound gases
AIR LIQUIDE AMERICAN50 citations95
US5855647AJan 5, 1999
Process for recovering SF6 from a gas
AIR LIQUIDE AMERICAN48 citations93
US6187077B1Feb 13, 2001
Separation of CF4 and C2F6 from a perfluorocompound mixture
AIR LIQUIDE AMERICAN24 citations92
US6444011B2Sep 3, 2002
Process and system for separation and recovery of perfluorocompound gases
AIR LIQUIDE AMERICAN15 citations91
US5426944AJun 27, 1995
Chemical purification for semiconductor processing by partial condensation
AIR LIQUIDE AMERICAN20 citations90
US6096114AAug 1, 2000
Process for recovering SF6 from a gas
AIR LIQUIDE AMERICAN24 citations89
US6214089B1Apr 10, 2001
Process and system for separation and recovery of perfluorocompound gases
AIR LIQUIDE AMERICAN12 citations81
US6458217B1Oct 1, 2002
Superadiabatic combustion generation of reducing atmosphere for metal heat treatment
AIR LIQUIDE AMERICAN6 citations74
US6389845B1May 21, 2002
Method and apparatus for separation of SF6 from CF4 /air-containing gas stream
AIR LIQUIDE AMERICAN13 citations74
US5968334AOct 19, 1999
Process for recovering CF4 and C2 F6 from vent gases of an aluminum production cell
AIR LIQUIDE AMERICAN5 citations63
AIR LIQUIDE
6 patentsUS5759237AJun 2, 1998
Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases
AIR LIQUIDE101 citations97
US5785741AJul 28, 1998
Process and system for separation and recovery of perfluorocompound gases
AIR LIQUIDE64 citations95
US6312502B1Nov 6, 2001
Process and system for separation and recovery of perfluorocompound gases
AIR LIQUIDE17 citations91
US6254666B1Jul 3, 2001
Process and system for separation and recovery of perfluorocompound gases
AIR LIQUIDE13 citations81
US6605133B1Aug 12, 2003
Process and system for separation and recovery of perfluorocompound gases
AIR LIQUIDE10 citations73
US6517771B1Feb 11, 2003
Superadiabatic combustion generation of reducing atmosphere for metal heat treatment
AIR LIQUIDE5 citations63
AMERICAN AIR LIQUIDE CHICAGO R
2 patentsUS5480677AJan 2, 1996
Process for passivating metal surfaces to enhance the stability of gaseous hydride mixtures at low concentration in contact therewith
AMERICAN AIR LIQUIDE CHICAGO R50 citations90
US5255445AOct 26, 1993
Process for drying metal surfaces using gaseous hydrides to inhibit moisture adsorption and for removing adsorbed moisture from the metal surfaces
AMERICAN AIR LIQUIDE CHICAGO R24 citations90