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Inventor
VAN DOREN MATTHEW J
US
5 patents
⚠️ This page may combine multiple inventors who share the name “VAN DOREN MATTHEW J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SILICON VALLEY GROUP
3 patents
US5733024A
Mar 31, 1998
Modular system
SILICON VALLEY GROUP
123 citations
95
US5733096A
Mar 31, 1998
Multi-stage telescoping structure
SILICON VALLEY GROUP
66 citations
94
US5700046A
Dec 23, 1997
Wafer gripper
SILICON VALLEY GROUP
183 citations
94
ASML HOLDING NV
1 patent
US7869003B2
Jan 11, 2011
Lithographic apparatus and device manufacturing method with reticle gripper
ASML HOLDING NV
32 citations
90
VEECO INSTR INC
1 patent
USD921431S
Jun 8, 2021
Multi-filament heater assembly
VEECO INSTR INC
6 citations
80