Inventor

KANATA HIROYUKI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “KANATA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJITSU LTD

4 patents

US5667923ASep 16, 1997

Charged particle beam exposure compensating proximity effect

FUJITSU LTD27 citations89

US6033134AMar 7, 2000

Resist developing apparatus used in process for production of semiconductor device

FUJITSU LTD13 citations72

US7321151B2Jan 22, 2008

Semiconductor device and method of fabricating the same

FUJITSU LTD4 citations61

US5783367AJul 21, 1998

Process for production of semiconductor device and resist developing apparatus used therein

FUJITSU LTD5 citations61

FUJITSU MICROELECTRONICS LTD

2 patents

US7585739B2Sep 8, 2009

Semiconductor device and method of fabricating the same

FUJITSU MICROELECTRONICS LTD6 citations72

US7663187B2Feb 16, 2010

Semiconductor device and method of fabricating the same

FUJITSU MICROELECTRONICS LTD0 citations51