P

Inventor

MORI TETSUYA

JP68 patents
⚠️ This page may combine multiple inventors who share the name “MORI TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

13 patents
US5751404AMay 12, 1998

Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates

CANON KK54 citations96
US5331371AJul 19, 1994

Alignment and exposure method

CANON KK60 citations96
US5309197AMay 3, 1994

Projection exposure apparatus

CANON KK76 citations96
US6091481AJul 18, 2000

Positioning method and projection exposure apparatus using the method

CANON KK31 citations93
US5814425ASep 29, 1998

Method of measuring exposure condition and/or aberration of projection optical system

CANON KK24 citations93
US5594549AJan 14, 1997

Position detecting method and projection exposure apparatus using the same

CANON KK23 citations93
US5268744ADec 7, 1993

Method of positioning a wafer with respect to a focal plane of an optical system

CANON KK42 citations93
US5166754ANov 24, 1992

Alignment system

CANON KK44 citations93
US5971577AOct 26, 1999

Light source device and illumination system

CANON KK20 citations92
US6608666B2Aug 19, 2003

Reference plate, exposure apparatus, device manufacturing system, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method

CANON KK18 citations82
US6268902B1Jul 31, 2001

Exposure apparatus, and manufacturing method for devices using same

CANON KK3 citations63
US5999270ADec 7, 1999

Projection exposure apparatus and microdevice manufacturing method using the same

CANON KK3 citations63
US6280062B1Aug 28, 2001

Light source device and illumination system

CANON KK2 citations62

HORIBA LTD

6 patents

MORI TETSUYA

4 patents

OMRON TATEISI ELECTRONICS CO

3 patents

SUMITOMO BAKELITE CO

3 patents

HOKKO CHEM IND CO

3 patents

NAKAJIMA SEIJI

2 patents

CHOKI KOJI

2 patents

HAYASHIBARA BIOCHEM LAB

1 patent

ZAIDAN HOJIN BISEIBUTSU

1 patent

MATSUYAMA MUTSUHIRO

1 patent

ELZE COMPANY LTD

1 patent

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent

KIKUCHI HIROYUKI

1 patent

IDO TAKUYA

1 patent

KAWASAKI HEAVY IND LTD

1 patent

PANASONIC CORP

1 patent

YASUDA KOJI

1 patent

MURATA MANUFACTURING CO

1 patent

YAMAGUCHI MASANORI

1 patent

OSAKA GAS CO LTD

1 patent

HAYASHIBARA CO

1 patent

Showing the top 50 of 68 patents by PatentIndex Score.