Inventor
PROGLER CHRISTOPHER J
US24 patents
⚠️ This page may combine multiple inventors who share the name “PROGLER CHRISTOPHER J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PHOTRONICS INC
11 patentsUS6828068B2Dec 7, 2004
Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same
PHOTRONICS INC36 citations93
US7074530B2Jul 11, 2006
Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same
PHOTRONICS INC13 citations90
US9304334B2Apr 5, 2016
Microfluidic thermoptic energy processor
PHOTRONICS INC5 citations84
US7851110B2Dec 14, 2010
Secure photomask with blocking aperture
PHOTRONICS INC11 citations84
US7356374B2Apr 8, 2008
Comprehensive front end method and system for automatically generating and processing photomask orders
PHOTRONICS INC11 citations82
US7473500B2Jan 6, 2009
Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same
PHOTRONICS INC9 citations81
US9933611B2Apr 3, 2018
Microfluidic thermoptic energy processor
PHOTRONICS INC1 citations52
US7943273B2May 17, 2011
Photomask with detector for optimizing an integrated circuit production process and method of manufacturing an integrated circuit using the same
PHOTRONICS INC0 citations52
US7344824B2Mar 18, 2008
Alternating aperture phase shift photomask having light absorption layer
PHOTRONICS INC1 citations52
US6933084B2Aug 23, 2005
Alternating aperture phase shift photomask having light absorption layer
PHOTRONICS INC0 citations52
US12164225B2Dec 10, 2024
System, method, and program product for manufacturing a photomask
PHOTRONICS INC0 citations44
IBM
10 patentsUS6869739B1Mar 22, 2005
Integrated lithographic print and detection model for optical CD
IBM95 citations98
US6020966AFeb 1, 2000
Enhanced optical detection of minimum features using depolarization
IBM93 citations98
US5452090ASep 19, 1995
CCD based confocal filtering for improved accuracy in x-ray proximity alignment
IBM69 citations96
US5072126ADec 10, 1991
Promixity alignment using polarized illumination and double conjugate projection lens
IBM89 citations96
US6417929B1Jul 9, 2002
Optical measurement of lithographic power bias of minimum features
IBM38 citations92
US6183919B1Feb 6, 2001
Darkfield imaging for enhancing optical detection of edges and minimum features
IBM41 citations92
US6048651AApr 11, 2000
Fresnel zone mask for pupilgram
IBM27 citations92
US6327023B1Dec 4, 2001
Optimization of reticle rotation for critical dimension and overlay improvement
IBM14 citations73
US6919146B2Jul 19, 2005
Planar reticle design/fabrication method for rapid inspection and cleaning
IBM4 citations62
US6950183B2Sep 27, 2005
Apparatus and method for inspection of photolithographic mask
IBM1 citations52