Inventor
MAKHAMREH KHALID
US23 patents
⚠️ This page may combine multiple inventors who share the name “MAKHAMREH KHALID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS11803118B2Oct 31, 2023
Methods and apparatus for photomask processing
APPLIED MATERIALS INC2 citations71
US11798799B2Oct 24, 2023
Ultraviolet and ozone clean system
APPLIED MATERIALS INC2 citations71
US12159782B2Dec 3, 2024
Ultraviolet and ozone clean system
APPLIED MATERIALS INC0 citations61
US12128456B2Oct 29, 2024
Megasonic clean with cavity property monitoring
APPLIED MATERIALS INC0 citations61
US11654460B2May 23, 2023
Megasonic clean with cavity property monitoring
APPLIED MATERIALS INC0 citations61
US11114350B2Sep 7, 2021
Method for removing photoresist from photomask substrate
APPLIED MATERIALS INC1 citations61
US10962889B2Mar 30, 2021
Method and apparatus for high throughput photomask curing
APPLIED MATERIALS INC0 citations57
US10928724B2Feb 23, 2021
Attachment feature removal from photomask in extreme ultraviolet lithography application
APPLIED MATERIALS INC0 citations57
US12233441B2Feb 25, 2025
Ultraviolet and ozone cleaning apparatus and method of using
APPLIED MATERIALS INC0 citations50
US12085849B2Sep 10, 2024
Baking chamber with shroud for mask clean
APPLIED MATERIALS INC0 citations50
US11921422B2Mar 5, 2024
Single-volume baking chamber for mask clean
APPLIED MATERIALS INC0 citations50
US11644748B2May 9, 2023
Multi-volume baking chamber for mask clean
APPLIED MATERIALS INC0 citations50
NANOCLEAN TECHNOLOGIES INC
7 patentsUS6530823B1Mar 11, 2003
Methods for cleaning surfaces substantially free of contaminants
NANOCLEAN TECHNOLOGIES INC70 citations94
US6764385B2Jul 20, 2004
Methods for resist stripping and cleaning surfaces substantially free of contaminants
NANOCLEAN TECHNOLOGIES INC34 citations90
US7297286B2Nov 20, 2007
Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants
NANOCLEAN TECHNOLOGIES INC12 citations83
US6945853B2Sep 20, 2005
Methods for cleaning utilizing multi-stage filtered carbon dioxide
NANOCLEAN TECHNOLOGIES INC12 citations82
US6719613B2Apr 13, 2004
Methods for cleaning surfaces substantially free of contaminants utilizing filtered carbon dioxide
NANOCLEAN TECHNOLOGIES INC12 citations71
US7101260B2Sep 5, 2006
Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants
NANOCLEAN TECHNOLOGIES INC6 citations62
US7040961B2May 9, 2006
Methods for resist stripping and cleaning surfaces substantially free of contaminants
NANOCLEAN TECHNOLOGIES INC5 citations60