Inventor
DAGAN ELIYAHU SHLOMO
US9 patents
Patents
9 patentsUS11803118B2Oct 31, 2023
Methods and apparatus for photomask processing
APPLIED MATERIALS INC2 citations71
US11798799B2Oct 24, 2023
Ultraviolet and ozone clean system
APPLIED MATERIALS INC2 citations71
US12159782B2Dec 3, 2024
Ultraviolet and ozone clean system
APPLIED MATERIALS INC0 citations61
US12128456B2Oct 29, 2024
Megasonic clean with cavity property monitoring
APPLIED MATERIALS INC0 citations61
US11654460B2May 23, 2023
Megasonic clean with cavity property monitoring
APPLIED MATERIALS INC0 citations61
US12233441B2Feb 25, 2025
Ultraviolet and ozone cleaning apparatus and method of using
APPLIED MATERIALS INC0 citations50
US12085849B2Sep 10, 2024
Baking chamber with shroud for mask clean
APPLIED MATERIALS INC0 citations50
US11921422B2Mar 5, 2024
Single-volume baking chamber for mask clean
APPLIED MATERIALS INC0 citations50
US11644748B2May 9, 2023
Multi-volume baking chamber for mask clean
APPLIED MATERIALS INC0 citations50