Inventor
UNO TOMIO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “UNO TOMIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJIKIN KK
12 patentsUS6152168ANov 28, 2000
Pressure-type flow rate control apparatus
FUJIKIN KK112 citations97
US6820632B2Nov 23, 2004
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
FUJIKIN KK39 citations96
US6422264B2Jul 23, 2002
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
FUJIKIN KK64 citations96
US6302130B1Oct 16, 2001
Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers
FUJIKIN KK77 citations96
US6289923B1Sep 18, 2001
Gas supply system equipped with pressure-type flow rate control unit
FUJIKIN KK61 citations96
US6848470B2Feb 1, 2005
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
FUJIKIN KK15 citations92
US6158679ADec 12, 2000
Orifice for pressure type flow rate control unit and process for manufacturing orifice
FUJIKIN KK37 citations91
US7594517B2Sep 29, 2009
Gas supply facility of a chamber and a method for an internal pressure control of the chamber for which the facility is employed
FUJIKIN KK8 citations84
US7367241B2May 6, 2008
Differential pressure type flowmeter and differential pressure type flow controller
FUJIKIN KK10 citations84
US7798167B2Sep 21, 2010
Internal pressure controller of chamber and internal pressure subject-to-control type chamber
FUJIKIN KK14 citations82
US7219533B2May 22, 2007
Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method
FUJIKIN KK7 citations74
US7926509B2Apr 19, 2011
Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method
FUJIKIN KK6 citations61
OHMI TADAHIRO
3 patentsUS6450190B2Sep 17, 2002
Method of detecting abnormalities in flow rate in pressure-type flow controller
OHMI TADAHIRO57 citations96
US6394415B1May 28, 2002
Fluid control valve and fluid supply/exhaust system
OHMI TADAHIRO43 citations92
US6193212B1Feb 27, 2001
Fluid control valve and fluid supply/exhaust system
OHMI TADAHIRO30 citations92