Inventor
REGULSKI CARY
US6 patents
Patents
6 patentsUS6409781B1Jun 25, 2002
Polishing slurries for copper and associated materials
ADVANCED TECH MATERIALS71 citations96
US6692546B2Feb 17, 2004
Chemical mechanical polishing compositions for metal and associated materials and method of using same
ADVANCED TECH MATERIALS70 citations94
US6527819B2Mar 4, 2003
Polishing slurries for copper and associated materials
ADVANCED TECH MATERIALS24 citations92
US7029373B2Apr 18, 2006
Chemical mechanical polishing compositions for metal and associated materials and method of using same
ADVANCED TECH MATERIALS47 citations91
US6936542B2Aug 30, 2005
Polishing slurries for copper and associated materials
ADVANCED TECH MATERIALS9 citations73
US7427567B2Sep 23, 2008
Polishing slurries for copper and associated materials
ADVANCED TECH MATERIALS1 citations58